A Dual Cylindrical Tunable Laser based on MEMS

Free space optics is considered the topic of the day and have a large variety of applications which free space separates source from destination such as External cavity tunable laser (ECTL). In ECTL, laser source emits Gaussian beam that propagates in plane with substrate until reach external reflector. The efficiency of these applications depends on the amount of light that coupled back to the laser, called coupling efficiency. Increasing coupling efficiency depends on using assembled lens's or any optical part in the path between laser front facet and external reflector, which result in increasing the cost and integration effort. We innovate here anew configuration of external cavity tunable laser based on cylindrical (curved) Mirrors. The usage of cylindrical mirror affects on the amount of light that coupled back to laser and that decreases the alignment requirement in the laser assembly as compared to another configurations based on flat mirror. The fabrication of cylindrical mirror is simple with respect to spherical mirror so it can be used in batch fabrication. Tuning achieved by using micro electro mechanical system MEMS technology. The system consists of a laser cavity and a two filter cavities for wavelength selection. The formation of cylindrical microstructures were made into the substrate volume. So we report also the micromachining method that used for fabricating the cylindrical mirror. Anisotropic etching and the deep reactive ion etching (DRIE) are especially useful for the batch fabrication of large optical mechanical devices. The characteristics of the laser's spectral response versus laser facet reflectance variations are described via simulations. The diffraction of light in ECTL formed by the laser front facet and the external reflector are taken into account. Here we report all things about the model including the fabrication steps and simulation analysis. Keywords—Dual ECT; wavelength tuning; MEMS; DRIE